Title:
塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法
Document Type and Number:
Japanese Patent JP6488718
Kind Code:
B2
Abstract:
A salt which has a group represented by formula (a): wherein Xa and Xb each independently represent an oxygen atom or a sulfur group; X1 represents a C1-C12 divalent saturated hydrocarbon group which has a hydroxy group; and * represents a binding site.
Inventors:
Tatsuro Masuyama
Koji Ichikawa
Masashi Yoshida
Koji Ichikawa
Masashi Yoshida
Application Number:
JP2015010962A
Publication Date:
March 27, 2019
Filing Date:
January 23, 2015
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07D317/72; C07C381/12; C07D319/08; C07D327/06; C09K3/00; G03F7/004; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP2014224984A | ||||
| JP2010134279A | ||||
| JP2011037837A | ||||
| JP2013235250A | ||||
| JP2007145822A | ||||
| JP2006257078A | ||||
| JP2012229206A | ||||
| JP2012230363A |
Foreign References:
| US3641039 | ||||
| WO2013129266A1 |
Other References:
FAIRBOURNE, A. et al.,Journal of the Chemical Society,1926年,pp. 3240-3241
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto