塩、レジスト組成物及びレジストパターンの製造方法

Title:

塩、レジスト組成物及びレジストパターンの製造方法

Document Type and Number:

Japanese Patent JP5879834

Kind Code:

B2

Abstract:

The present invention provides a salt represented by the formula (I): wherein R1, R2, L1, Y, R3, R4, R5, R6, R7, n, s, and R8 represent variables outlined in the specification.

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Inventors:

Yukako Adachi
Koji Ichikawa

Application Number:

JP2011194759A

Publication Date:

March 08, 2016

Filing Date:

September 07, 2011

Export Citation:

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Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07C309/17; C07D327/06; C09K3/00; G03F7/004; G03F7/039; H01L21/027

Domestic Patent References:

JP2009186952A
JP2010039476A
JP2012037864A
JP2011113034A

Attorney, Agent or Firm:

Toru Nakayama
Toru Sakamoto

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