Title:
METHOD AND APPARATUS FOR COATING PHOTOSENSITIVE SUBSTANCE
Document Type and Number:
Japanese Patent JP2004017043
Kind Code:
A
Abstract:
To provide a method and an apparatus for coating a photosensitive substance, by which faulty coating can be minimized.
A roller 210 is arranged between a slit coater 180 for supplying the photosensitive substance and a subject 310 to be coated so that the amount of the photosensitive substance to be supplied from the coater 180 is stabilized. The supply amount-stabilized photosensitive substance is supplied to the subject 310. The photosensitive substance contains an additive for adjusting the solid content, boiling point and surface tension of the photosensitive substance. As a result, the photosensitive substance can be applied so that a coating film having uniform thickness can be formed on the subject 310.
Inventors:
JUNG SUNG-KI
Application Number:
JP2003119704A
Publication Date:
January 22, 2004
Filing Date:
April 24, 2003
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
B05C5/02; B05C11/10; B05D1/26; G03C1/74; G03G7/00; G03F7/16; H01L21/027; (IPC1-7): B05D1/26; B05C5/02; B05C11/10; G03G7/00
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Masao Hashimoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Masao Hashimoto
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