To provide a method and an apparatus, by which difference of the depth of a groove in the peripheral direction due to eccentricity becomes small, surface roughness nearly equal to that of a mirror surface can be obtained, and further minute undulations can be simultaneously and uniformly manufactured on the surface to be machined.
In the method and apparatus for finely machining a workpiece surface by giving a rolling and sliding motion to a machining tool and a workpiece by bringing a machining surface 21a of the machining tool 21 and a workpiece surface 22a of the workpiece 22 into contact with each other via viscus fluid so that the circumscribing curves of the respective profile curves are brought into contact with each other and by making the machining tool and the workpiece relatively rotate, the workpiece surface is finely machined by setting temperature of the viscus fluid, the relative rotational speed of the machining tool and the workpiece, and a pressing force between the machining tool and the workpiece so that the thickness of the viscus fluid at the contact point predicted by the elastic hydrodynamic lubrication (EHL) theory becomes the required thickness.
NAKAYAMA TATSUOMI
YASUDA YOSHITERU
CHIBA HIROTAKA
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