Title:
METHOD AND APPARATUS FOR HIGH-SENSITIVITY ANALYSIS OF IMPURITIES IN GASEOUS HYDRIDE
Document Type and Number:
Japanese Patent JP2799116
Kind Code:
B2
Abstract:
PURPOSE: To provide an analytical method wherein, in a method adopting a method to introduce an impurity component into a high-sensitivity detector in a state that a hydride component as a main component has been removed by operating a precutting valve, its precutting operation can be performed surely and to provide an apparatus for it.
CONSTITUTION: A gaseous hydride 1 as a gas to be measured is introduced into a separating column 4 so as to be accompanied by a carrier gas 2, and the hydride component as a main component is separated from an impurity component. At this time, the hydride component is evacuated to the outside of an analytical system by operating a precutting valve 6 on the basis of the detection of a hydride detector 5. The operation of the hydride detector 5 is interlocked with that of the precutting valve 6. The impurity component which is eluted faster or slower than the hydride component is introduced into a high- sensitivity detector 10, and impurities are analyzed. After the impurity component has been separated further by a separating column 9, it is introduced into the high sensitivity detector 10 and impurities can be analyzed.
Inventors:
Takayoshi Adachi
Uchino Makoto
Taizo Ichida
Uchino Makoto
Taizo Ichida
Application Number:
JP1802893A
Publication Date:
September 17, 1998
Filing Date:
January 08, 1993
Export Citation:
Assignee:
Taiyo Toyo Oxygen Co., Ltd.
International Classes:
G01N30/04; G01N30/14; G01N30/16; (IPC1-7): G01N30/04; G01N30/14
Domestic Patent References:
| JP4278458A | ||||
| JP5183596A | ||||
| JP58176548A |
Attorney, Agent or Firm:
Seishi Oishi