Title:
METHOD AND APPARATUS FOR INSPECTING COMPONENT, AND MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2006210415
Kind Code:
A
Abstract:
To achieve a method and apparatus for inspecting a component for managing performance and deterioration degree for each component by detecting unique impedance with high sensitivity and high accuracy, and by quantitatively comparing the difference between components.
A component (1) to be measured is closely stuck on a lower electrode (3) and an upper electrode (4) in electromagnetic shields (2, 6). The lower electrode and the shields are grounded, the upper electrode is insulated from the shields by an insulator (5), frequency is swept from a network analyzer (8), and a high-frequency signal is supplied to the upper electrode. Accordingly, its impedance is measured.
Inventors:
FUJII KAZUYUKI
Application Number:
JP2005017199A
Publication Date:
August 10, 2006
Filing Date:
January 25, 2005
Export Citation:
Assignee:
RENESAS TECH CORP
International Classes:
H01L21/3065; C23C16/52
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai