Title:
METHOD AND APPARATUS FOR INSPECTING DEFECTS IN SPECIMEN
Document Type and Number:
Japanese Patent JP2002323454
Kind Code:
A
Abstract:
To provide a method and an apparatus for inspecting defects in a specimen.
The method is used for inspecting or measuring the specimen 2 using lighting with a two-dimensional and spatial pattern. In the method for inspecting the defects in the specimen 2, an image-pickup means 3 for separating colored pattern lighting from the wavelength constituent of light for picking up an image should be used.
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Inventors:
KURUMIZAWA MAKOTO
Application Number:
JP2001129905A
Publication Date:
November 08, 2002
Filing Date:
April 26, 2001
Export Citation:
Assignee:
ASAHI GLASS CO LTD
International Classes:
G01B11/30; G01N21/88; G01N21/958; G06T1/00; H04N1/48; (IPC1-7): G01N21/88; G01B11/30; G01N21/958; G06T1/00; H04N1/48