Title:
METHOD AND APPARATUS FOR MANUFACTURING CIRCUIT BOARD
Document Type and Number:
Japanese Patent JP3645462
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To detect a foreign matter floated in a treating chamber by an optical system constituted of one observing window and one unit and to accurately detect very weak light scattered by the foreign matter.
SOLUTION: In forming and treating a desired thin film on a material to be treated in the treating chamber, a P-polarized beam intensity-modulated by a frequency different from the frequency of an exciting source and a frequency different from its integer multiple is emitted into the chamber through an observing window having an inclination of the Brewster angle to the P- polarized input beam. A back scattered light by the matter in the chamber is photodetected an imaged by a detecting optical system through the same window. The frequency component and the wavelength component of the intensity-modulated beam are detected from the photodetected signals. Then, the number, the size and the distribution of the matters are discriminated by using the detected components and the image information obtained.
Inventors:
Hiroyuki Nakano
Toshihiko Nakata
Seri Masayoshi Sawa
Toshihiko Nakata
Seri Masayoshi Sawa
Application Number:
JP2000010271A
Publication Date:
May 11, 2005
Filing Date:
January 17, 2000
Export Citation:
Assignee:
Renesas Technology Corp.
International Classes:
H01L21/302; G01N21/956; H01J37/32; H01L21/3065; H01L21/66; (IPC1-7): H01L21/66
Domestic Patent References:
| JP10503289A | ||||
| JP6082358A | ||||
| JP7174557A | ||||
| JP8122427A | ||||
| JP9033430A | ||||
| JP9243549A | ||||
| JP10010036A | ||||
| JP11251252A | ||||
| JP11330053A |
Attorney, Agent or Firm:
Yamato Tsutsui
Yasuo Sakuta
Yasuo Sakuta
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