Title:
METHOD AND APPARATUS FOR MANUFACTURING PIEZO-ELECTRIC CERAMIC FILM
Document Type and Number:
Japanese Patent JPS6246579
Kind Code:
A
Abstract:
1. Method for making piezoceramic membranes, in which powdery ceramic starting materials undergo shaping into a blank, with a thickness : area ratio which is typical for membranes, having a thickness of below 200 mu m, and are subsequently sintered by heat treatment, and converted through conversion combustion into the piezoceramic state, said blank being able to be used as a membrane ; said method using the following criteria when manufacturing the blank : - the manufacture occurs by compressing the powdery starting material in a pressing device comprising an extrusion die as well as a lower and upper punch, displaceable relative thereto, whereby a) a volumetric filling-in of the starting material when the lower punch is lowered and levelling of the powder at a constant height occur, b) subsequently the layer of the prescribed height of the starting powder is compressed at a prescribed pressure, c) for removing the membrane blank from the mould the lower punch and upper punch are displaced synchronously in the compressed state, relative to the extrusion die and firstly then the upper and lower punch are moved apart.
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Inventors:
DEIITAA DOURUGOTSUSHIYU
Application Number:
JP19388386A
Publication Date:
February 28, 1987
Filing Date:
August 19, 1986
Export Citation:
Assignee:
SIEMENS AG
International Classes:
B28B3/00; B28B3/08; B28B7/38; B28B13/02; H01L41/22; H01L41/33; (IPC1-7): H01L41/22
Attorney, Agent or Firm:
Tomimura Kiyoshi