Title:
METHOD AND APPARATUS FOR MEASURING FILM THICKNESS
Document Type and Number:
Japanese Patent JPH05312525
Kind Code:
A
Abstract:
PURPOSE:To provide a method and apparatus for accurately measuring the thickness of glass film, deposited on a glass substrate of an optical device through soot deposition, without causing any damage on the glass substrate while grasping secondary distribution of the glass film. CONSTITUTION:Soot (q) is removed over a predetermined region at the opposite ends on a glass substrate (p) prior to be sintered thus exposing the glass substrate (p). The soot (q) is subsequently sintered to produce a glassy optical device (s), for which step shape of the glass substrate (p) and a glass film(f) is optically read out at positions on a line connecting the exposed parts p1, p2 on the glass substrate (p). Thickness of the glass film (f) is then determined based on the data relevant to the step shape thus read out.
Inventors:
IKUNISHI SHIYOUGO
Application Number:
JP11483192A
Publication Date:
November 22, 1993
Filing Date:
May 07, 1992
Export Citation:
Assignee:
MITSUBISHI CABLE IND LTD
International Classes:
G01B11/06; (IPC1-7): G01B11/06
Attorney, Agent or Firm:
Kazuhide Okada