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Title:
METHOD AND APPARATUS FOR MEASURING OBJECT SHAPE
Document Type and Number:
Japanese Patent JP2002071325
Kind Code:
A
Abstract:

To solve the problem that in a conventional objective measuring apparatus which measures the shape of an object to be measured by using an optical cutting method, the center position of the image of slit light is deviated from the center position in the width direction of intrinsic slit light, when the object to be measured has a curved surface, such as a circular cylinder, since the center position of the image of the slit light is found by performing a load-averaging operation along the arrangement direction of image sensors used to image an optical cutting image, and that the measurement accuracy of the shape is lowered.

Since the width direction of local slit light is found along the found width direction of the slit light, and load-averaging operation is performed, the center position of the slit light is decided. As a result, the shape can be measured with high accuracy, irrespective of the shape of the object to be measured.


Inventors:
NISHIKAWA KOHEI
AKAMATSU MASARU
Application Number:
JP2000265201A
Publication Date:
March 08, 2002
Filing Date:
September 01, 2000
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
G01B11/24; (IPC1-7): G01B11/24
Attorney, Agent or Firm:
Takeo Honjo