Title:
METHOD OF AND APPARATUS FOR MEASURING RESISTANCE AND CAPACITY OF ELECTRONIC COMPOSITION ELEMENT
Document Type and Number:
Japanese Patent JPS5786768
Kind Code:
A
Abstract:
A method for measuring a resistance and a capacitance of an electronic component utilizes electron beam measuring technology to impress a current IA by means of a pulsed electron beam on the component. A potential curve U(t) which arises during the pulse on the electronic component as a result of the impressed current is utilized together with the known current to determine the resistance R and the capacitance C by means of an appropriate selection of two measuring points U(t1) and U(t2) on the potential curve.
Inventors:
HANSUPEETAA FUOIERUBAUMU
URURITSUHI KUNAUERU
URURITSUHI KUNAUERU
Application Number:
JP15191681A
Publication Date:
May 29, 1982
Filing Date:
September 25, 1981
Export Citation:
Assignee:
SIEMENS AG
International Classes:
G01R27/02; G01Q30/02; G01R27/00; G01R31/26; G01R31/305; (IPC1-7): G01R27/02
Domestic Patent References:
| JPS51148495A | 1976-12-20 |