Title:
METHOD AND APPARATUS FOR MEASURING THREE-DIMENSIONAL SHAPE
Document Type and Number:
Japanese Patent JP2001343222
Kind Code:
A
Abstract:
To provide a method and an apparatus for measuring three- dimensional shapes in which objects to be measured can be highly accurately and nondestructively measured in a simple constitution.
In the apparatus and method for measuring three-dimensional shapes, the shape of the measurement sample is measured by using an optical heterodyne measurement beat signal obtained from a face of the measurement sample as a focus detection signal in the three-dimensional shape-measuring apparatus which uses the optical heterodyne method for measuring the three- dimensional shape of the sample by focusing the measurement light onto the measurement sample face with the use of an optical head.
Inventors:
IIJIMA HITOSHI
Application Number:
JP2000168195A
Publication Date:
December 14, 2001
Filing Date:
June 05, 2000
Export Citation:
Assignee:
CANON KK
International Classes:
G01B11/00; G01B11/24; G01B11/245; G01B9/02; (IPC1-7): G01B11/24; G01B9/02; G01B11/00
Domestic Patent References:
JPH04188003A | 1992-07-06 | |||
JPH02173505A | 1990-07-05 | |||
JPH0474914A | 1992-03-10 | |||
JPH085314A | 1996-01-12 | |||
JP2000146516A | 2000-05-26 | |||
JPH0395906U | 1991-09-30 | |||
JPH10185529A | 1998-07-14 | |||
JPH0560511A | 1993-03-09 | |||
JPH0650733A | 1994-02-25 | |||
JPS61202128A | 1986-09-06 | |||
JPH0821704A | 1996-01-23 | |||
JPH02122206A | 1990-05-09 |
Attorney, Agent or Firm:
Takanashi Yukio