METHOD AND APPARATUS FOR MEASURING VIBRATION

Japanese Patent JPH02259431

A

PURPOSE:To measure vibration with high accuracy by controlling the vibration of a support stand so that a beam splitter or the like become a vibration-free state and measuring only the vibration of a object to be measured by a photodetector. CONSTITUTION:The transmission laser beam having frequency f0 transmitted from a laser transmitter 6 is split by beam splitters 7 - 9 and one of the split laser beams advances straightly to reach an object 70 to be measured and receives the effect of the vibration of the object 70 to be measured to become a reflected laser beam which in turn returns to the splitters 7 - 9 as well as reaches photodetectors 11, 12 by reflection. The other split laser beam is reflected in a right-angled direction by the splitters 7 - 9 and not only refracted in the vibration direction of the object 70 to be measured by a reflecting mirror 10 but also reflected by a beam reflecting body 1 to return to the splitters 7 - 9 to reach the photodetectors 11, 12. As a result, since the beam reflecting body 1 receives the vibration of a support stand 5 to control the extension and contraction of a piezoelectric body 4 and a control gain can be set so that the beam reflecting body 1 becomes a vibration-free state, the frequency of the laser beam reflected by the beam reflecting body 1 is held to f0 as it is.

TAKAMATSU HIROYUKI
NISHIMOTO YOSHIRO
YANAI TOSHIYUKI
IMADA HIROSHI

JP8128589A

October 22, 1990

March 30, 1989

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HYOGO PREFECTURE
KOBE STEEL LTD

G01H9/00; (IPC1-7): G01H9/00

Kaneda Kan (1 person outside)

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