Title:
METHOD AND APPARATUS FOR OBSERVING AND ANALYZING CHANGE IN SOLID SURFACE IN ATMOSPHERIC PRESSURE
Document Type and Number:
Japanese Patent JPH04326007
Kind Code:
A
Abstract:
PURPOSE:To achieve observation and analysis of changes in the solid surface on the spot with a high controllability attributed to an active gas component in an atmospheric pressure by observing the solid surface in an atmosphere of the atmospheric pressure of an inert gas mixed with an active gas. CONSTITUTION:An observation chamber 13 equipped with an observation/ analysis device for changes in a solid surface is connected to a surface treating chamber 12 for treating the solid surface and a sample introduction chamber 11. The chambers are filled with an inert gas while the sample introduction chamber 11 is provided with an evacuation mechanism 20. With the observation chamber 13, an active gas is mixed and a sample is irradiated with light depending on the case to observe changes in the surface of the sample caused by the active gas or light irradiation under the atmospheric pressure. Thus, a series of operations are carried out in the chambers connected together being maintained at the atmospheric pressure thereby achieving observation and analysis of changes in the solid surface with a high controllability.
Inventors:
OOTA NAHOMI
Application Number:
JP12183791A
Publication Date:
November 16, 1992
Filing Date:
April 25, 1991
Export Citation:
Assignee:
NEC CORP
International Classes:
G01B21/30; G01N31/00; G01N37/00; G01Q30/02; G01Q30/08; G01Q30/12; G01Q30/20; G01Q60/24; G01Q80/00; H01L21/66; (IPC1-7): G01B21/30; G01N31/00; H01L21/66
Attorney, Agent or Firm:
Chieko Tateno