To provide a method for producing a functional gas continuously by a thermal reaction of a plurality of gaseous raw materials even when a compound such as a fluorine compound having high reactivity is used as the gaseous raw material.
The method for producing the functional gas continuously by reacting the plurality of gaseous raw materials with one another comprises the steps of: introducing the plurality of gaseous raw materials into a cylinder the outer wall of which is heated; moving the gaseous raw materials introduced into the cylinder and a gaseous reaction product from the upstream side thereof to the downstream side; and withdrawing the gaseous raw materials and the gaseous reaction product from the cylinder. At the step of moving the gaseous raw materials and the gaseous reaction product, they are moved from the upstream side thereof to the downstream side while turning them from the inner wall surface thereof to the opposite inner wall surface.
NAKAHARA KEITA
TAKEDA YUTA
