To provide a method and an apparatus for treating exhaust gas generated from a cleaning liquid based on ammonia and hydrogen peroxide in a scrubbing column, for enabling reduction of the initial cost and the running cost of equipment.
A minute waterdrop generating part 6, a gas-liquid separating part 7, a gas stream generating part (a fan) 4 and an ammonium ion removing unit 11 are provided on the ventilation side of a scrubbing unit. NH4+ and H2O2 in the cleaning water absorbing the ammonia gas and hydrogen peroxide gas generated from the chamber 1 are removed by the unit 11. The treated water treated in the unit 11 is supplied again to the part 6 by a pump 10 so that the treated water is divided into minute waterdrops, which are then mixed with the exhaust gas 5a containing the ammonia gas and the hydrogen peroxide gas sucked by the part 4 to adsorb the ammonia gas and the hydrogen peroxide gas. The gas 5a is made to be purified air 5b by catching the ammonia gas/ hydrogen peroxide gas-adsorbed minute waterdrops in the part 7, which is then sent to the blowing port 1a side of the chamber 1 or the inside of the chamber 1.
HIRANO MAKOTO
HIROSE TATSUMI
SHIMIZU SHIGEMI
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