METHOD AND APPARATUS FOR TREATING ARTICLE

Japanese Patent JP2004268019

A

To treat an article with a high-density treating fluid in a treating room while applying an ultrasonic energy in treating.

The high-density treating fluid may be generated in an alternative boosting vessel to be transported to the treating room or may be directly generated in the treating room. A treating agent can be added to the boosting vessel, the treating room or a high-density fluid while the fluid is transported from the boosting vessel to the treating room. The ultrasonic energy can be continuously generated at a constant frequency or a variable frequency, or may be intermittently generated.

JP3490446	Description: Fluids and methods for removing contaminants from surfaces
JPS588398	[Title of the device] Liquid purification circle method cleaning equipment
JPH07503400	INDUSTRIAL APPLICABILITY: A method for removing a liquid from a notch in an article.

MCDERMOTT WAYNE THOMAS
SUBAWALLA HOSHANG
JOHNSON ANDREW DAVID
SCHWARZ ALEXANDER

JP2003331811A

September 30, 2004

September 24, 2003

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AIR PROD & CHEM

B08B3/08; B08B3/12; B08B7/00; C11D7/50; C11D11/00; H01L21/304; H01L21/311; C11D7/24; C11D7/26; C11D7/32; G03F1/82; H01L21/00; (IPC1-7): B08B7/00; B08B3/08; B08B3/12; H01L21/304

Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama

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