To provide a method for applying a coating liquid, in which the utilizing efficiency of the coating liquid can be made extremely high and the amount of the coating liquid to be required to form a coating film can be made extremely small.
The method for applying the coating liquid comprises a step S3 (a supply step) of concentrically supplying the coating liquid of a minutely linearized state almost all over the surface of a substrate while leaving a minute space between the adjacent concentric circles and a step S4 (a leveling step) of leveling the coating liquid supplied to the substrate by slightly exerting power on the coating liquid to the plane direction. Since the supplied coating liquid is leveled by slightly exerting power to the plane direction, the minute spaces are filled with the coating liquid without scattering the coating liquid in the vicinity to cover the whole surface of the substrate with the coating liquid. Therefore, almost all of the supplied coating liquid can be utilized for forming the coating film and the utilizing efficiency of the coating liquid can be maximized.
COPYRIGHT: (C)2008,JPO&INPIT
SANADA MASAKAZU
SHIGEMORI KAZUSHI
