Title:
ＭＥＭＳ素子内の通路の封鎖方法
Document Type and Number:
Japanese Patent JP7223853
Kind Code:
B2
Abstract:
A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.
Inventors:
Altman, Hans
Friedrich, Thomas
Ametowabura, Mauri
Baber, Helibert
Schmorg louver, Peter
Hermes, Christoph
Menold, Tobias Joachim
Friedrich, Thomas
Ametowabura, Mauri
Baber, Helibert
Schmorg louver, Peter
Hermes, Christoph
Menold, Tobias Joachim
Application Number:
JP2021534972A
Publication Date:
February 16, 2023
Filing Date:
December 13, 2019
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
B81C1/00; B23K26/21; B81B3/00; H01L29/84; H04R19/04; H04R31/00
Domestic Patent References:
| JP2016539015A | ||||
| JP2008296336A | ||||
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Foreign References:
| US20160368763 | ||||
| US20150351246 |
Attorney, Agent or Firm:
Osamu Yamamoto
Junichi Matsuo
Yoko Fujiki
Junichi Matsuo
Yoko Fujiki
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