PURPOSE: To clean a material such as optical electronic parts to the highest degree by degreasing the material with an aq. detergent, then cleaning and rinsing the material with water and pure water, dehydrating the material with isopropyl alcohol(IPA), replacing the IPA with siloxane and drying the material.

CONSTITUTION: This cleaning device consists of eleven treating tanks 1 ahd a hot-air drier 20 and is divided into the degreasing stage A, cleaning and rinsing stage B, dehydrating stage C and a stage D wherein IPA is replaced by siloxane. The first and second tanks 1 are filled with a surfactant 2, the third and fourth tanks 1 with an alkaline surfactant 3 and the fifth to seventh tanks 1 with pure water, and the material is cleaned in the respective tanks. The eighth and ninth tanks 1 are charged with IPA 5 and the tenth and eleventh tanks 1 with a low-mol.wt. polysiloxane 6, the IPA 5 and the polysiloxane 6 are separated by an IPA separator set in the circulating lines of the tenth and eleventh tanks 1, and the polysiloxane 6 is regenerated.