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Title:
METHOD OF COATING RESIST
Document Type and Number:
Japanese Patent JP2006167650
Kind Code:
A
Abstract:

To provide a method of coating resist enabling uneveness of a surface of a substrate to be sufficiently flattened by using a coater of a simple constitution.

In the method of forming a resist film 22 on the surface of the substrate 11 having an uneven shape, the surface of the substrate has an uneven shape, and when coating resist on the surface of the substrate 11 having the uneven shape by using an ink jet head, a surface of the resist film 22 is flattened by coating through changing a coating amount of a resist material for a recess part 25 from that for a protrusion part 26.


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Inventors:
FURUMURA NOBUYUKI
Application Number:
JP2004365681A
Publication Date:
June 29, 2006
Filing Date:
December 17, 2004
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B05D5/12; B05D1/26; G03F7/16; H01L21/027
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito



 
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