Title:
METHOD OF COATING SENSITIVE PHYSICAL STRUCTURE SO AS TO INTERACT IN APPROXIMATELY AIRTIGHT MANNER
Document Type and Number:
Japanese Patent JPS59688
Kind Code:
A
Abstract:
A method for quasi-hermetically covering physical structures on structure supports is described, which is low in its back-action on the structures to be protected and is especially suited for covering strain guage strips on cantilever beam measuring springs. In the method films made of a vacuum-tight, inorganic material are used as the covering substance, these films intimately joining both the structure to be protected and the surface zone of the support in the immediate vicinity of the structure. The use of films of monocrystalline structure, for instance mica films, is especially recommended, and it also is recommended to decrease the thickness of these films, once they are deposited, by suitable procedures such as etching or cleaving off crystal layers.
Inventors:
KURAUSU HORUN
Application Number:
JP5937783A
Publication Date:
January 05, 1984
Filing Date:
April 06, 1983
Export Citation:
Assignee:
IND AUTOMACHION BUEEGEEUNTO PU
International Classes:
B32B17/06; B32B19/04; G01B7/16; G01L1/22; G12B9/04; B32B7/04; (IPC1-7): B32B7/04; B32B17/06; B32B19/04; G01B7/16; G12B9/04
Attorney, Agent or Firm:
Toshio Yano
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