Title:
METHOD FOR COATING ZIRCONIUM AND ITS ALLOY WITH CERAMIC
Document Type and Number:
Japanese Patent JPS6280270
Kind Code:
A
Abstract:
PURPOSE: To obtain a Zr product having superior wear resistance and superior resistance to embrittlement by hydrogen and He by successively forming two ceramic layers on the surface of Zr or a Zr alloy by physical vapor deposition and chemical vapor deposition.
CONSTITUTION: The 1st coating layer is formed on the surface of Zr or a Zr alloy by physical vapor deposition (PVD) with ceramics such as ZrC, SiC, other carbide, ZrN, TiN or other nitride. PVD includes ion sputtering and sputtering. The thickness of the 1st layer is preferably regulated to ≥0.3μm. The 2nd coating layer is then formed on the 1st layer by chemical vapor deposition (CVD) with said ceramics or a mixture thereof. A thickness of ≥1μm is favorable for the 2nd layer.
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Inventors:
YASHIKI TETSUO
FUJIMORI NAOHARU
DOI AKIRA
FUJIMORI NAOHARU
DOI AKIRA
Application Number:
JP22084885A
Publication Date:
April 13, 1987
Filing Date:
October 03, 1985
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C23C14/06; C23C14/14; C23C16/30; C23C16/32; C23C16/34; C23C16/38; C23C16/40; (IPC1-7): C23C14/06; C23C16/30; C23C16/32; C23C16/34; C23C16/38; C23C16/40
Attorney, Agent or Firm:
Takashi Koshiba (1 person outside)
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