Title:
METHOD FOR COMPENSATION OF MEASUREMENT ERROR, METHOD FOR QUALITY DECISION OF ELECTRONIC COMPONENT AND ELECTRONIC COMPONENT CHARACTERISTICS MEASURING SYSTEM
Document Type and Number:
Japanese Patent JP3558080
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To correct a measurement result of actual measurement which does not completely agree with a reference measurement device similarly to the measurement result of the reference measurement device.
SOLUTION: The impedance of data acquisition sample 11B for correction is measured with a reference measurement device 1 and an actual measurement device 2, respectively, and a correlation between the measurement result by the actual measurement device 2 and the measurement result by the reference measurement device 1 is obtained. By calculating the impedance of a measuring object electric component 11A measured with the actual measurement device 2 by substituting in the correlation, the impedance of the measuring object electric component 11A is corrected to an impedance estimated when measured with the reference measurement device 1.
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Inventors:
Kamiyadake
Application Number:
JP2003011164A
Publication Date:
August 25, 2004
Filing Date:
January 20, 2003
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01R27/02; G01R35/00; (IPC1-7): G01R35/00; G01R27/02
Domestic Patent References:
| JP8043463A | ||||
| JP3105264A | ||||
| JP61112971A | ||||
| JP62191774A |
Attorney, Agent or Firm:
Kazuhide Okada
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