Title:
METHOD OF DEPOSITING METAL COMPOUND FILM AND MANUFACTURING METHOD OF ORGANIC LIGHT-EMITTING DEVICE
Document Type and Number:
Japanese Patent JP2015232161
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of depositing a metal compound film, which allows depositing a high-quality metal compound film while the number of times of chamber cleaning is reduced, and a method of manufacturing an organic light-emitting device.SOLUTION: A deposition process of an AlOfilm on a SiO film using a reactive sputtering method is repeated for multiple times. After the deposition process of the AlOfilm is consecutively repeated m times, a sub-sputtering process is performed before a (m+1)-th film deposition process is performed. A coating film 701 is formed, in which an Al film 7011 and the AlOfilm are laminated in this order on an inner wall surface 70d of a chamber 70 by the sub-sputtering. When a total deposition thickness tof a laminated body of a coated laminated body 700 reaches 300 μm by performing the sub-sputtering process multiple times, operation of a production line is stopped and an inside of the chamber 70 is cleaned to remove the coated laminated body 700 deposited on the inner wall surface 70d.
Inventors:
SAKAI JUNJI
Application Number:
JP2014119435A
Publication Date:
December 24, 2015
Filing Date:
June 10, 2014
Export Citation:
Assignee:
JOLED INC
International Classes:
C23C14/00; C23C14/34; H01L21/316; H01L51/50; H05B33/04; H05B33/10; H05B33/22
Attorney, Agent or Firm:
Patent business corporation Nakajima intellectual property integrated office
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