METHOD FOR DETECTING ABNORMALITY OF CRUCIBLE

Title:

METHOD FOR DETECTING ABNORMALITY OF CRUCIBLE

Document Type and Number:

Japanese Patent JP3922623

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a method for instantaneously and accurately detecting an abnormality, e.g. crack or flaking occurring on the outer surface of a crucible in a heating/temperature rising process.
SOLUTION: In the heating/temperature rising process of a ceramic crucible containing carbon or a carbon compound, concentration of CO2 or CO in purge air flowing around the crucible varies upon occurrence of an abnormality, e.g. crack or flaking, on the outer surface of the crucible. This phenomenon is utilized for measuring the concentration of CO2 or CO in the purge air and detecting an abnormality of the crucible based on the variation thereof.

Inventors:

Shunji Inoue
Katsutoshi Departmenta
Yasushi Ito

Application Number:

JP2001178459A

Publication Date:

May 30, 2007

Filing Date:

June 13, 2001

Export Citation:

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