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Title:
METHOD FOR DETECTING APPLIED MATERIAL ON SUBSTRATE
Document Type and Number:
Japanese Patent JPH08254491
Kind Code:
A
Abstract:

To detect presence of an organic matter solderable protective film (OSP) on a substrate by placing a liquid droplet on the surface of a copper substrate, for example, and measuring a contact angle defined by the wall of liquid droplet and the surface of substrate.

When a liquid droplet D for test is placed on the surface S of a metal substrate (e.g. copper), an image is formed by the liquid droplet. Contact angles A, B, defined by the wall of liquid droplet D and the surface S of metal substrate, are then measured and compared with a known contact angle defined by an OSP selected from a group of imidazole and a bare surface S. Since the contact angles A, B lack symmetry, measurements are taken by number of times sufficient for obtaining a mean measurement appropriate statistically for the counterpart contact angle. Since the uncertainty increases as the interval between preparation of sample and test increases, the time between preparation and test is set short, preferably within 5-20min.


Inventors:
MAAKU HAWAADO HAN
MARII RIN PATAASON
Application Number:
JP31020895A
Publication Date:
October 01, 1996
Filing Date:
November 29, 1995
Export Citation:
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Assignee:
AT & T CORP
International Classes:
G01N13/00; B23K1/00; G01N13/02; G01N21/88; G01N21/956; H05K3/00; H05K3/28; H05K3/34; (IPC1-7): G01N13/00; B23K1/00; G01N21/88; H05K3/00; H05K3/28; H05K3/34
Attorney, Agent or Firm:
Masao Okabe (2 outside)