Title:
METHOD FOR DETERMINING OPTIMUM USE NUMBER OF SUBMODULES OF SEMICONDUCTOR MANUFACTURING APPARATUS COMPRISING SUBSTRATE PROCESSING MODULE HAVING MULTIPLE SUBMODULES, AND SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2022107939
Kind Code:
A
Abstract:
To accurately estimate the optimum use number of modules of a semiconductor manufacturing apparatus.SOLUTION: A method is applied to the semiconductor manufacturing apparatus comprising one or a plurality of substrate processing modules each having a plurality of submodules. The method includes the steps of: estimating the optimum use number of the submodules based upon a target production quantity and a predicted production quantity of substrates, and a use rate of a substrate processing module; generating a schedule for processing substrates with the optimum use number of submodules based upon the estimated optimum use number; updating the predicted production quantity and the use rate based upon the generated schedule; and repeating the step for the estimation using the updated predicted production quantity and use rate to update the optimum use number of the submodules.SELECTED DRAWING: Figure 4
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Inventors:
KOIZUMI TATSUYA
Application Number:
JP2021002657A
Publication Date:
July 25, 2022
Filing Date:
January 12, 2021
Export Citation:
Assignee:
EBARA CORP
International Classes:
G05B19/418; H01L21/02
Attorney, Agent or Firm:
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Naoki Ohfusa
Yukio Kanegae
Makoto Watanabe
Naoki Ohfusa