To provide a method and device for cleaning a probe which can make process simpler, without giving damages to probes.

An ultrasonic vibrating body 22 is installed to a cylindrical body 21 supported to face a probe card 10, on which the probes 12 are formed and an ultrasonic wave generating device 23 which ultrasonically vibrates the vibrating body 22 is provided. Foreign matters adhering to the surfaces of the probes 12 are removed in a noncontacting state by aerial vibrations by successively making the antinode of a standing wave to coincide with the positions of the probes 12, by relatively moving the cylindrical body 21 with respect to the probe card 10, in a state where the standing wave having a concentric node and antinode is generated by ultrasonically vibrating the vibrating body 22 by means of the ultrasonic wave generating device 23.