Title:
METHOD OF AND DEVICE FOR CLEANING SURFACE
Document Type and Number:
Japanese Patent JPS5351142
Kind Code:
A
Abstract:
Molecular hydrogen is caused to flow past a hot filament and then past an article having surfaces which are to be cleaned located in a vacuum chamber, at a pressure such that the mean free path of hydrogen molecules is less than the minimum space between the surfaces to be cleaned and the walls of the container. Some of the hydrogen molecules are converted by the hot filament into hydrogen atoms, which react with contaminants on the surface to be cleaned to form products that can be removed by the flow of gas. Other devices can be used for dissociating hydrogen flowing into the chamber into hydrogen atoms and/or ions. Cleaning is effective even on surfaces facing away from the location where the hydrogen atoms are formed.
Inventors:
KARURU YUURUGEN DEIITSU
FURANSOWAAZU UEERUBUREEKU
FURANSOWAAZU UEERUBUREEKU
Application Number:
JP12466577A
Publication Date:
May 10, 1978
Filing Date:
October 19, 1977
Export Citation:
Assignee:
KERNFORSCHUNGSANLAGE JUELICH
International Classes:
B08B7/00; C23F4/00; C23G3/00; C23G5/00; (IPC1-7): B23P1/20