To provide a sheet substrate conveying method that realizes a non-snaky instantaneous stop with speed conveyance while a conveyance position accuracy is maintained accurately and cleanly even in a substrate conveyance handling a plurality of plate sizes thereof in the sheet substrate conveying method.

The sheet substrate conveying method that includes an air floating rail and a drive region rail on a device base and disposes the floating auxiliary region of a substrate retention member above the air floating rail, disposes the drive auxiliary region above the drive region rail and conveys the sheet substrate loaded on the substrate retention member where the floating auxiliary region and the drive auxiliary region are integrated on the device base, wherein the air floating rail and the drive region rail and the floating auxiliary region or the drive auxiliary region are superposed, the substrate retention member is non-contact, can be moved at a high speed, and can be suspended with the substrate retention member kept floating as it stands by the air jetting from the air floating rail and applying voltage to the drive region rail.