To perform transfer to subsequent operation after the occurrence of an error through automation or semi-automation.

Positioning pins 12a-12c are arranged on a conveyance arm 12. During assist of error in conveyance of a substrate, a substrate S1 is pressed against the positioning pins and through alignment of the substrates in a given position, the substrate to which displacement in a position occurs is restored to an automatic conveyable state. The substrates S1 aligned on the conveyance arm by means of the positioning pins 12a-13c are conveyed to an alignment unit, wherein after restoration of the conveyance arm to a regular position, automatic conveyance is re-started.