PURPOSE: To accurately remove defective data created by a defect in a sample, an excitation failure and so on by using data on an excited element to be measured when respective emission line light intensity of plural monitor elements exists in an effective range, as effective data.

CONSTITUTION: The spark light between a sample 3 and a counter electrode 4 is passed through an inlet slit 6, and is divided by means of a diffraction grating 7, and these are passed through outlet slits 8-11 arranged in emission line positions of respective elements, and are made incident on photomultipliers 12-15, and are integrated by means of single-pulse integrators 16-19, and are inputted individually in order to an A/D converter 21 by means of a switch 20. A memory 22 stores data from outputs of the converter 21 in time series for each element. Spark discharge is carried out thousand-several thousand times between the sample 3 and the counter electrode 4, and obtained emission line light intensity data on the respective elements are stored in the memory 22, and an effective range is determined from dispersed condition of data for each element. The emission line light intensity in the same discharge of an internal standard element and the element to be measured, where the whole single data exists in the effective range, is extracted from the memory 22, and measurement values of these elements to be measured are calculated.