Title:
METHOD AND DEVICE FOR EVALUATING STAGE LOADING
Document Type and Number:
Japanese Patent JPH0786365
Kind Code:
A
Abstract:
PURPOSE: To evaluate the loading state of works in an oven core tube (e.g. separation of thin films, abrasion of stage rollers, occurrence of defects in works, and others in an oven core tube) in a real time.
CONSTITUTION: When a stage 3 mounted with works is loaded into an oven core tube 7 by a pull rod 1, the loading state of a stage is evaluated basing on ultrasonic signals detected by a contact-type ultrasonic detector 11 mounted on the pull rod 1.
Inventors:
AOYAMA SUSUMU
Application Number:
JP23267193A
Publication Date:
March 31, 1995
Filing Date:
September 20, 1993
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Kitano Yoshito
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