PURPOSE: To improve the characteristic of a material by irradiating the surface of the solid material with a molecular beam which is variable in energy and thermally non-equilibrium and making the molecule or atom selectively adsorbed on a specified adsorption seat.
CONSTITUTION: Metallic Ba, for example, is introduced into a raw gas chamber 1, heated by a heater 4 to form vaporous Ba and mixed with gaseous He supplied from a high-pressure gas tank 2 in a dilution chamber 10. The gaseous mixture is injected into an irradiation chamber 11 from a nozzle hole 4 to irradiate a W sample 5. A monochromatic molecular beam or atomic beam is used in this way to vary the energy with high precision, and the molecule or atom is adsorbed on the adsorption seat having a desired activation energy. Accordingly, performance is improved in the various functional materials with the characteristic controlled by the surface structure.
KAJIYAMA HIROSHI
MIYAKE TATSUYA
