PURPOSE: To provide the possibility of observing a specimen in the condition its surface is kept clean while using an electron beam of large current, thereby enhance the signal-noise ratio, and perform the observation of a defective part having a gradual section shape in good performance.

CONSTITUTION: An electron beam 4 of large current is cast from an electron gun 5 onto a specimen 3. The secondary electrons or reflex electrons from the specimen 3 are sensed by sensors 7, 8, and on the basis of the output therefrom a display device 9 displays the shape of the specimen surface 3a to be inspected. Attached object to the surface 3a is removed by sputtering of an Ar ion beam from an eye for cleaning 11. The surface 3a thus cleaned is kept at 100-300°C by a heater 10, which precludes attaching of decomposed components of the gas in the atmosphere.