METHOD AND DEVICE FOR MANUFACTURING POLYCRYSTAL SILICON ROD

Title:

METHOD AND DEVICE FOR MANUFACTURING POLYCRYSTAL SILICON ROD

Document Type and Number:

Japanese Patent JPS58217416

Kind Code:

A

Inventors:

UORUFUGANGU KERAA
AREKUSANDAA RUDOSHIYUTETSUKU
HANSU YURUGEN FUENTSURU

Application Number:

JP9389783A

Publication Date:

December 17, 1983

Filing Date:

May 27, 1983

Export Citation:

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Assignee:

SIEMENS AG

International Classes:

B22D25/04; B22C1/12; C01B33/02; C01B33/037; C30B13/00; C30B29/06; H01L21/208; (IPC1-7): B22C1/12; B22C9/06; B22D25/04; C01B33/02; C30B13/00; C30B29/06

Attorney, Agent or Firm:

Tomimura Kiyoshi

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