PURPOSE: To easily manufacture a three-dimensional supper lattice by forming interference fringes of electron beams on a substrate and adhering and piling up desired atoms or molecules while the interference fringes are changed with time.
CONSTITUTION: When a single crystal substrate 13 is irradiated with a light-and- shade pattern of electron beams, substrate atoms in a section where the electron beams 2 are concentrated are energitically excited and a dangling bond changes in strength and forms a potential valley or mountain against atoms which come flying. The phase-matched electron beams 2 are emitted by applying 10kV across a field emission type electron gun l. In addition, the beams 2 are transformed to parallel beams by means of an electron beam lens 3 and a spatial modulation filter 4 is inserted into a spatially half area in the middle. The filter 4 is made of Al foil of 5μm in thickness and has a pattern formed by removing the foil from the space where the pattern is formed by photoetching. The pattern is formed by simulating the inverted Fourier pattern of a desired interference pattern with a computer.
YAGI IKUTAKE
SUGIYAMA YASUYUKI
