Title:
METHOD OF AND DEVICE FOR MEASURING POTENTIAL WITH NO CONTACT AT ELECTRONIC PART
Document Type and Number:
Japanese Patent JPS54157085
Kind Code:
A
Abstract:
The secondary electrons released as a result of the primary electron beam from the electronic element (14) whose energy is dependent on the voltage are detected by a spectrometer (16) having at least one control electrode (24, 25). Control means incorporating a variable- gain amplifier (40), a lock-in amplifier (52) and modulation means (50) are associated with the spectrometer (16) and serve to control the voltage of the control electrode(s) (24, 25) in dependence on a value which is proportional to the integral of the energy distribution of the secondary electrons detected, such that, whatever the voltage at the measuring point, substantially only secondary electrons having energies which are not less than the maximum of the energy distribution of the secondary electrons released from the electronic element are detected. Thus deviation of the operating point caused by low energy secondary electrons not being able to escape from the electronic element at positive voltages is compensated for.
Inventors:
HANSUPEETAA FUOIERUBAUMU
Application Number:
JP6456079A
Publication Date:
December 11, 1979
Filing Date:
May 24, 1979
Export Citation:
Assignee:
SIEMENS AG
International Classes:
G01R19/00; G01R31/302; G01R31/305; G01N23/227; H01J37/28; H01L21/66; (IPC1-7): G01N27/60; G01R31/26
Other References:
JOURNAL OF PHYSICS E: SCIENTIFIC INSTRUMENTS=1974