To control process pressure with high accuracy and improve size accuracy in polishing of a sphere, by setting pressure of at least one of the component supporting a rolling mechanism and the component supporting a guide slide mechanism to static pressure.
When high pressure hydraulic fluid is supplied from a passage 27 through a orifice 26 to static pressure pockets 25a-25c between engaging protrusions 17a, 17b of a guiding body 17 and engaging grooves 23a, 23b of the supporting component 7a on a base stand 6, this pressure affects the top, bottom, and sides of the engaging protrusions 17a, 17b to maintain the guiding body 17 so that frictional resistance in the engaging grooves 23a, 23b of the supporting component 7a on a base stand 6 is almost negligible. Process pressure for each phase of processing is controlled with high accuracy by setting the pressure of the guide slide mechanism S of the guiding body 17 to static pressure, so processing rate, diameter, and processing accuracy adequate to each phase are provided.
SATO CHUICHI
NOJIMA HIROYUKI
SUMIDA YUICHI
HARUTAKE SHOJI
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