Title:
窒化金属膜を作製する方法及び装置
Document Type and Number:
Japanese Patent JP4350686
Kind Code:
B2
Inventors:
Hitoshi Sakamoto
Ken Ogura
Yoshiyuki Ohba
Toshihiko Nishimori
Naoki Yahata
Ken Ogura
Yoshiyuki Ohba
Toshihiko Nishimori
Naoki Yahata
Application Number:
JP2005208408A
Publication Date:
October 21, 2009
Filing Date:
July 19, 2005
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C16/34; C23C16/448; H01L21/28; H01L21/285; H01L21/316; H01L21/318; B23B27/14
Domestic Patent References:
| JP3649697B2 | ||||
| JP8193267A | ||||
| JP10177972A | ||||
| JP50119575A | ||||
| JP2001284285A |
Foreign References:
| WO2001073159A1 |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi