METHOD AND DEVICE FOR REMOVING TREATING SOLUTION FROM TREATING SOLUTION PATH

Title:

METHOD AND DEVICE FOR REMOVING TREATING SOLUTION FROM TREATING SOLUTION PATH

Document Type and Number:

Japanese Patent JP2001032072

Kind Code:

A

Abstract:

To effectively purge a treating soln. from a treating soln. carrying system by providing a purge valve effectively bonded to a treating soln. path on the space between 1st and 2nd insulating valves and effectively bonded to a purge gas source and a pump valve effectively bonded to a pump.

A 1st short pass insulating valve and a 2nd short pass insulating valve prescribe the space between the small parts 17' of a treating soln. path 17, e.g. the space between two insulating valves at the time of being clogged. After that, the part of a purge gas line 29 on the space between the treating soln. path 17 and a short pass purge valve 45 and the part of a short pass pump line 49 between the treating soln. path 17 and the short pass pump valve 47 purge a treating soln. by opening the short pass purge valve 45 and the short pass pump line 49. The pump/purge cycle is desirably used for the space between the purges.

Inventors:

YOSHIDOME TED G
MANDREKAR TUSHAR
KHURANA NITIN
ANISH TORIA

Application Number:

JP2000105631A

Publication Date:

February 06, 2001

Filing Date:

February 18, 2000

Export Citation:

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Assignee:

APPLIED MATERIALS INC

International Classes:

F17D1/08; B05C11/10; B08B9/032; C23C16/455; F16K27/00; H01L21/205; H01L21/30; (IPC1-7): C23C16/455; F17D1/08; H01L21/205

Domestic Patent References:

JPS6483664A	1989-03-29
JPH09298171A	1997-11-18

Attorney, Agent or Firm:

Minoru Nakamura (9 outside)

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