To accurately evaluate the wettability of surface of a substrate by using a simple and easy method.
A substrate 8 to be tested is loaded and secured horizontally on a spin table 4 in such a room where temperature and humidity are well conditioned, and it is turned by a motor 2. First, it is turned at a low speed and a specified amount of liquid is supplied to the substrate 8 through a nozzle 5. Then, after the supply of liquid is stopped, it is turned at a high speed, and it is stopped a specified time later. The surface of stopping substrate 8 is picked up by a camera 6, and the result is automatically processed by a picture analyzer 7, then the remaining condition of liquid drop on the surface thereof is discriminated so as to evaluate the wettability of the surface of substrate on the basis of the result.
FUKUHARA MASAKI
IKEDA HIROSHI
