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Title:
METHOD FOR DIVIDING PLATE-SHAPED WORK
Document Type and Number:
Japanese Patent JP2011035245
Kind Code:
A
Abstract:

To extend and divide a plate-shaped work formed with a metallic layer on a substrate after irradiating the substrate with a laser beam.

After a degeneration layer 7 is formed along a division scheduled line 2 inside a wafer 1 in a work 10 having a double-layer structure formed with a solder layer (metallic layer) 5 on a back face 1b of a wafer (substrate ) 1, and then the work 10 is folded along a division scheduled line 2, and the wafer 1 is divided with the degeneration layer 7 as a start point in this stage, and a weak section 8 is formed in the solder layer 5. Then, a tape 12 for extension is extended, an external force is added to the solder layer 5, the solder layer 5 is divided with the weak point 8 as the start point, and the work 10 is completely divided.


Inventors:
YODO YOSHIAKI
NAKAMURA MASARU
Application Number:
JP2009181439A
Publication Date:
February 17, 2011
Filing Date:
August 04, 2009
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23K26/38; B23K26/40
Domestic Patent References:
JP2006128211A2006-05-18
Attorney, Agent or Firm:
Suenari Mikio