Title:
METHOD FOR EMITTING CHARGED PARTICLE BEAM AND EMITTING DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3047908
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To control the quantity of radiation of a charged particle beam to the required value of quantity of radiation.
SOLUTION: In an irradiation chamber 9, the quantity of radiation is measured by a radiation monitor 8. A comparator 12 compares the measurement 17 of the quantity of radiation, which is outputted from the radiation monitor 8 with a set value 14b of the quantity of radiation which is outputted from a controller 10, and a gain control signal 18 is outputted to a gain controller 13 so that the measurement 17 attains the set value 14b. The amplitude of a high frequency voltage 16 applied to an electrode 7 is controlled.
Inventors:
Masahiro Tadokoro
Kazuo Hiramoto
Junichi Hirota
Masatsugu Nishi
Kazuo Hiramoto
Junichi Hirota
Masatsugu Nishi
Application Number:
JP7496199A
Publication Date:
June 05, 2000
Filing Date:
March 19, 1999
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G21K5/04; A61N5/10; H05H7/10; H05H13/04; (IPC1-7): H05H13/04; A61N5/10; G21K5/04; H05H7/10
Attorney, Agent or Firm:
Yasuo Sakuta