Title:
METHOD AND EQUIPMENT FOR CONTROLLING POSITION OF MOVING TABLE
Document Type and Number:
Japanese Patent JP3440516
Kind Code:
B2
Abstract:
PURPOSE: To provide a position control method and a position controller, in which a target position is not moved even when a moving table is rotated and shifted.
CONSTITUTION: A controller computes coordinate displacement (xs, ys) on the basis of the coordinates of a target position 31 and the center of rotation when a moving table 21 is turned at an angle θ2 and has a coordinate-displacement computing section outputting the result of the computation to X, Y-axes driving sections and a computation control section imparting the indication of computation to the coordinate-displacement computing section. The coordinate displacement (xs, ys) is calculated on the basis of the distance (a) of the target position and the center of rotation and the angle of rotation θ2 or the coordinate displacement (xs, ys) is calculated at every set angle and the moving table 21 is corrected in a control method.
Inventors:
Akifumi Ono
Application Number:
JP30716193A
Publication Date:
August 25, 2003
Filing Date:
November 11, 1993
Export Citation:
Assignee:
ソニー株式会社
International Classes:
B23Q15/22; B23Q15/013; G05D3/00; H01L21/027; H01L21/68; (IPC1-7): H01L21/68; G05D3/00; H01L21/027
Domestic Patent References:
| JP3155113A | ||||
| JP2142158A |
Attorney, Agent or Firm:
Kuninori Funabashi