Title:
METHOD AND EQUIPMENT FOR DISCRIMINATING CONDUCTIVITY TYPE OF SEMICONDUCTOR MATERIAL
Document Type and Number:
Japanese Patent JPH07142544
Kind Code:
A
Abstract:
PURPOSE: To discriminate different conductivity types accurately even when the conductivity types differ in the inside and surface of a semiconductor material.
CONSTITUTION: The surface and rear of a semiconductor material 50 are irradiated with light by light-emitting appliances 11, 12 to produce a photoelectromotive force at the surface and inside of the semiconductor material 50. The photoelectromotive forces generated at the surface and the inside are detected by a pair of electrodes 13, 14 brought into contact with one surface of the semiconductor material 50, and the conductivity type of the semiconductor material 50 is decided from the polarity of detected photoelectromotive force.
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Inventors:
KAMOSHITA YUZO
HIGUCHI HIROSHI
HIGUCHI HIROSHI
Application Number:
JP31428693A
Publication Date:
June 02, 1995
Filing Date:
November 19, 1993
Export Citation:
Assignee:
SANWA MUSEN SOKKI KENKYUSHO KK
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Osamu Matsumura