To provide a method for fabricating a downward type SMEM switch, and a downward type MEMS switch, capable of improving the performance of a reconfigured antenna by fabricating a contact pad which is actuated downward by piezoelectricity as it shares a layer with a RF signal line, after fabricating the RF signal line.
The downward type micro electro-mechanical system (EMS) switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven.
COPYRIGHT: (C)2007,JPO&INPIT
KIM JONG-SEOK
SONG INSANG
LEE SANG HOON
KIM DONG KYUN
CHOI JUNG-HAN
HONG YOUNG-TACK
KIM CHE-HEUNG
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
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