Title:
Method for film deposition
Document Type and Number:
Japanese Patent JP6010451
Kind Code:
B2
Inventors:
Mitsuhiro Tachibana
Hiroaki Ikekawa
Wamura Yu
Otani Muneyuki
Atsushi Ogawa
Kosuke Takahashi
Hiroaki Ikekawa
Wamura Yu
Otani Muneyuki
Atsushi Ogawa
Kosuke Takahashi
Application Number:
JP2012279922A
Publication Date:
October 19, 2016
Filing Date:
December 21, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; C23C16/56; H01L21/316
Domestic Patent References:
| JP2010239102A | ||||
| JP2011066367A | ||||
| JP2010080924A | ||||
| JP2011210872A | ||||
| JP2010062370A | ||||
| JP2012009823A | ||||
| JP2013153143A | ||||
| JP2012069871A | ||||
| JP2012049394A | ||||
| JP2010239103A |
Foreign References:
| US20080075858 | ||||
| US20100055319 | ||||
| US20090324826 | ||||
| US20110236598 | ||||
| US20130164945 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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